TY  - JOUR
T1  - Theoretical Study of Energy Distribution Function and Other Parameters for
CF<sub>4</sub>-He Gas Mixtures Discharge
AU - J. Jader, Mohammed 
JO  - Journal of Engineering and Applied Sciences
VL  - 13
IS  - 18
SP  - 7648
EP  - 7655
PY  - 2018
DA  - 2001/08/19
SN  - 1816-949x
DO  - jeasci.2018.7648.7655
UR  - https://makhillpublications.co/view-article.php?doi=jeasci.2018.7648.7655
KW  - Electric discharge
KW  -collisions
KW  -gas mixtures
KW  -Boltzmann equation
KW  -CF -He
KW  -Maxwellian distribution
AB  - In this research, the electron energy distribution function of electrons in plasma discharge is studied for CF<sub>4</sub>-He gas mixtures. The Boltzmann equation was solved by using Fortran computer program. The Boltzmann transport equation was solved by using two-terms approximation for pure gases and mixtures. This method of solution is used to calculate the electron energy distribution function and electric transport parameters were evaluated in the range of E/N varying from 1H10<sup>-17</sup>#E/N#5H10<sup>-15</sup> V.cm<sup>2</sup>. The electron energy distribution function of CF<sub>4</sub>-He gas mixture is nearly of Maxwellian distribution at 1, 2 Td and when E/N$5 Td the distribution function is non Maxwellian. Also, the mixtures are have different energy values depended on transport energy between electron and molecule through the collisions.
ER  -