TY  - JOUR
T1  - Design and Simulation of MEMS Type Cathodic Ray Generator
AU - Bazarchi, Sadegh Mohammad Zadeh AU - Sani, Ebrahim Abaspoor 
JO  - Journal of Engineering and Applied Sciences
VL  - 12
IS  - 17
SP  - 4475
EP  - 4481
PY  - 2017
DA  - 2001/08/19
SN  - 1816-949x
DO  - jeasci.2017.4475.4481
UR  - https://makhillpublications.co/view-article.php?doi=jeasci.2017.4475.4481
KW  - MEMS type ionization gauge
KW  -MEMS type vacuum sensor
KW  -MEMS type cathode ray
KW  -vacuum pressure sensor
KW  -micro heater
KW  -MEMS type X-ray supply
AB  - In this study is about the design and simulation of Hot Cathode Filament (HCF) for genesis of
Cathode Ray (CR) at the MEMS scale. On the plan of this study nickel with a layer of oxide forms the cathode
and is capable of emitting electrons with 50 nA current at the temperature of 750°C. Also, it is considered that
the temperature is almost constant along the cathode and the emission of electrons is uniform in different parts.
Furthermore, the cathode temperature is independent of the vacuum pressure. The grid voltage which provides
the initial energy for electros is controllable providing the ability of turning the beam ON and OFF. It must be
mentioned that the power consumption of the cathode is low (69.2 mW) and its dimensions are 2.5×1.5×0.5 mm.
For the case of no target utilization, the energy of electrons reaches the value of 429 eV. On the design of this
scheme the MEMS technology has been employed and the distance of anode network, height, thickness,
number of the rods and other specifications of the anode to achieve the highest number and highest energy
for the electrons have been determined by simulations carried out using COMSOL. In addition, the analysis of
cathode temperature, cathode tension, electron movements, potential and electric field have been performed
in this study.
ER  -