TY  - JOUR
T1  - Prospects and Applications of Thin-Film Magnetostrictive
Membranes for Mems Transducers
AU - Amelichev, V.V. AU - Platonov, V.V. AU - Generalov, S.S. AU - Nikiforov, S.V. AU - Zhukov, D.A. AU - Vasilyev, D.V. AU - Kazakov, Yu.V. AU - Goldberg, Ya.V. 
JO  - Journal of Engineering and Applied Sciences
VL  - 12
IS  - 7
SP  - 1935
EP  - 1937
PY  - 2017
DA  - 2001/08/19
SN  - 1816-949x
DO  - jeasci.2017.1935.1937
UR  - https://makhillpublications.co/view-article.php?doi=jeasci.2017.1935.1937
KW  - Magnetostriction
KW  -thin film
KW  -MEMS transducer
KW  -thin membrane
KW  -India
AB  - The study gives an overview of the use of magnetostrictive films in physical quantities transducers
and demonstrates methodsof increasing their sensitive properties due to the implementation of magnetostrictive
materials in combination with corrugated membranes, manufactured using MEMS-technology process. This
research will provide results regarding magnetostrictive properties of FeNiCo 10 and 20-nm thin films formed
on the surface of silicon substrates.
ER  -