TY  - JOUR
T1  - Design and Analysis of MEMS High Sensitive Capacitive Pressure Sensor
AU - Ali, Muslihah AU - Soin, Norhayati AU - C.W. Noorakma, Abdullah AU - Yusof, Norliana AU - Wan Muhamad Hatta, S.F. 
JO  - Journal of Engineering and Applied Sciences
VL  - 11
IS  - 12
SP  - 2688
EP  - 2692
PY  - 2016
DA  - 2001/08/19
SN  - 1816-949x
DO  - jeasci.2016.2688.2692
UR  - https://makhillpublications.co/view-article.php?doi=jeasci.2016.2688.2692
KW  - MEMS
KW  -sensitivity
KW  -capacitive pressure sensor
KW  -clamped and slotted diaphragm
KW  -glaucoma
KW  -intraocular pressure
AB  - In this study, MEMS high sensitive capacitive pressure sensor based on poly-silicon diaphragm have
been designed and analysed by using COMSOL Multiphysics Software. Three sensor designs: clamped, 8
slotted and 4 slotted with and without Teflon (polytetrafluoroethylene) coating were tested and compared to
understand the sensitivity and deflection of the sensors. The pressure sensor was designed to evaluate the
pressure in ranges of 0-60 mmHg which is in the range of Intraocular Pressure (IOP) for glaucoma. The
capacitive pressure sensor is design using different structures of the diaphragm and it is identified that 4 slotted
square diaphragms gives the highest sensitivities amongst the presented design. By coating the diaphragm and
adding slots into the diaphragm, the displacement improves while mechanical and capacitance sensitivities
increase.
ER  -