TY  - JOUR
T1  - Research of Tactile Structure Based on MEMS Sensitive
Elements for Robotics and Tactile Diagnostics Devices
AU - Gusev, D.V. AU - Litvinenko, R.S. AU - Sukhanov, V.S. 
JO  - Journal of Engineering and Applied Sciences
VL  - 11
IS  - 6
SP  - 1366
EP  - 1369
PY  - 2016
DA  - 2001/08/19
SN  - 1816-949x
DO  - jeasci.2016.1366.1369
UR  - https://makhillpublications.co/view-article.php?doi=jeasci.2016.1366.1369
KW  - Minimally Invasive Surgery (MIS)
KW  -MEMS
KW  -robotics
KW  -trausborming
KW  -tactile sensor
KW  -transforming
AB  - Tactile sensor technologies are rapidly being evolved and interest in them is growing steadily. The main constraint in this area is not the limitation on the processing power of the applied processors but the absence of technology capable of transforming the volumetric tactile interaction into an electrical signal. The study presents, the design of a complex tactile structure based on silicon MEMS-CMOS crystals, containing piezoresistive sensitive elements. The tactile structure is developed for use in robotics and tactile diagnostics applications. The structure is covered with silicon layer for protection of the sensitive elements. The study presents, the results of research of determining the location of point-touch.
ER  -