TY  - JOUR
T1  - Research of Silicon MEMS Pressure Transducers Crystals for
Robotics and Tactile Diagnostics Devices
AU - Gusev, D.V. AU - Litvinenko, R.S. AU - Sukhanov, V.S. 
JO  - Journal of Engineering and Applied Sciences
VL  - 11
IS  - 6
SP  - 1363
EP  - 1365
PY  - 2016
DA  - 2001/08/19
SN  - 1816-949x
DO  - jeasci.2016.1363.1365
UR  - https://makhillpublications.co/view-article.php?doi=jeasci.2016.1363.1365
KW  - Minimally Invasive Surgery (MIS)
KW  -MEMS
KW  -tactile sensor
KW  -pressure
KW  -diagnostic
AB  - Owing to rapidly developing methods of minimally invasive surgery a new class of devices appeared. These devices are known as tactile sensors for remote palpation. They give a possibility to the surgeon not to enter into direct contact with the internal organs of the patient and obtain tactile data. The article presents the circuitry design of a silicon crystal matrix of piezoresistive pressure sensing elements MIPD-32 for tactile diagnostics devices. The crystal is manufactured by means of combination of MEMS and CMOS technologies. The research results of the characteristics of the crystals are shown.
ER  -