TY  - JOUR
T1  - Situation Cavity Effect on Power Absorbed by Plasma Microwave
AU - , N. Ikhlef AU - , A. Rezig AU - , M.R. Mekideche AU - , O. Leroy AU - , P. Leprince 
JO  - Journal of Engineering and Applied Sciences
VL  - 2
IS  - 7
SP  - 1157
EP  - 1160
PY  - 2007
DA  - 2001/08/19
SN  - 1816-949x
DO  - jeasci.2007.1157.1160
UR  - https://makhillpublications.co/view-article.php?doi=jeasci.2007.1157.1160
KW  - Plasma microwave
KW  -Finite Integration technique (FIT)
KW  -cavity effect
KW  -power absorbed
AB  - We present in this study a 3D numerical modelling of a microwave discharge (2.45GHz) excited by a surface wave in a large and small diameter cylindrical plasma cavity. Our first studies have been focused on the influence of the vertical situation of a short circuit in order to optimize the power coupling in the discharge. We used the CST microwave studio commercial code which solves Maxwell equations using the Finite Integration Technique (FIT).
ER  -