TY  - JOUR
T1  - Design, Simulation and Characterization of Piezoelectric Stack Actuator MEMS Based Microdroplet Ejector
AU - Ganesan, K. AU - Palanisamy, V. 
JO  - Research Journal of Applied Sciences
VL  - 9
IS  - 6
SP  - 314
EP  - 319
PY  - 2014
DA  - 2001/08/19
SN  - 1815-932x
DO  - rjasci.2014.314.319
UR  - https://makhillpublications.co/view-article.php?doi=rjasci.2014.314.319
KW  - MEMS
KW  -SOI
KW  -pyrex micromachining
KW  -eutectic bonding
KW  -anodic bonding
AB  - In this study, researchers present the design, analysis and fabrication of MEMS based silicon micro-needles for insertion of fluid into the dermis and subcutaneous fat layer of human skin. Microelectromechanical Systems (MEMS) are uncovered to an assortment of liquid environments in applications such as chemical and biological sensors and microfluidic devices. In this study, the design and fabrication of a multi-material high-performance micropump is presented. The fabrication process using MEMS fabrication techniques, comprised of silicon and pyrex micromachining and bonding. Manufacturing steps such as three small bulk cylindrical piezoelectric material elements that are integrated with micro-fabricated Silicon-On-Insulator (SOI) and glass micromachined substrates using eutectic bonding and anodic bonding processes were successfully realized and provide a robust and scalable production technique for the micro pump. Exceptional flow rates of 0.1 mL min<SUP>-1</SUP> with 1 W power consumption based on piezoelectric stack actuation achieved by appropriate design optimization. The analysis forecasts that the resultant stresses due to applied meandering and axial loads are in the safe range below the acquiesce strength of the material.
ER  -