@article{MAKHILLJEAS201611613742,
    title = {Research of Silicon MEMS Pressure Transducers Crystals for
Robotics and Tactile Diagnostics Devices},
    journal = {Journal of Engineering and Applied Sciences},
    volume = {11},
    number = {6},
    pages = {1363-1365},
    year = {2016},
    issn = {1816-949x},
    doi = {jeasci.2016.1363.1365},
    url = {https://makhillpublications.co/view-article.php?issn=1816-949x&doi=jeasci.2016.1363.1365},
    author = {D.V.,R.S. and},
    keywords = {Minimally Invasive Surgery (MIS),MEMS,tactile sensor,pressure,diagnostic},
    abstract = {Owing to rapidly developing methods of minimally invasive surgery a new class of devices appeared. These devices are known as tactile sensors for remote palpation. They give a possibility to the surgeon not to enter into direct contact with the internal organs of the patient and obtain tactile data. The article presents the circuitry design of a silicon crystal matrix of piezoresistive pressure sensing elements MIPD-32 for tactile diagnostics devices. The crystal is manufactured by means of combination of MEMS and CMOS technologies. The research results of the characteristics of the crystals are shown.}
    }