@article{MAKHILLJEAS20072712815, title = {Situation Cavity Effect on Power Absorbed by Plasma Microwave}, journal = {Journal of Engineering and Applied Sciences}, volume = {2}, number = {7}, pages = {1157-1160}, year = {2007}, issn = {1816-949x}, doi = {jeasci.2007.1157.1160}, url = {https://makhillpublications.co/view-article.php?issn=1816-949x&doi=jeasci.2007.1157.1160}, author = {N. Ikhlef,A. Rezig,M.R. Mekideche,O. Leroy and}, keywords = {Plasma microwave,Finite Integration technique (FIT),cavity effect,power absorbed}, abstract = {We present in this study a 3D numerical modelling of a microwave discharge (2.45GHz) excited by a surface wave in a large and small diameter cylindrical plasma cavity. Our first studies have been focused on the influence of the vertical situation of a short circuit in order to optimize the power coupling in the discharge. We used the CST microwave studio commercial code which solves Maxwell equations using the Finite Integration Technique (FIT).} }